Nitrogen trifluoride is an oxidizing compressed gas that has gained acceptance in a number of applications as a fluorinating agent. It is predicted that persons exposed to sulfuryl fluoride will show little. Fluorine fluorine nitrogen or xenon revision date jul2016 personal precautions evacuate personnel to safe areas. Msds document numbern000 revision dated 03 sept 96 in an emergency, call chemtrec at 8004249300 us toll free or 7035273887. Osha, cma, ansi, canadian whmis standards and ec standards section 1. Material safety data sheet clipper herbicide this material safety data sheet msds serves different purposes than and does not replace or modify the epaapproved product labeling attached to and accompanying the product container. Versum materials supplies 10% and 20% f2n2 fluorine nitrogen gas mixtures in individual cylinders and bulk tube trailers globally. Mixtures with oxygen may explode in presence of platinum catalyst.
Within this step a structure is etched into the semiconductors. Anhydrous ammonia msds number 2001 revised april 23, 2008 10 pages. Relevant identified uses of the substance or mixture and uses advised against use of the substancemixture. Airopak f2n2 20% fluorine in nitrogen mixture versum. Fluorine mixtures can be used mainly to clean nonplasma deposition chambers and diffusion furnace for siliconbased films. Safety data sheet nitrogen trifluoride section 1 linde gas. Assure that equipment is rated for pressure involved. As fluorine is corrosive, toxic, and highly reactive. Composition information on ingredients chemical name wt. Provide local exhaust or process enclosure ventilation system. You can locate these through the linde safety data sheet. As this product is a gas, refer to the inhalation section.
Mixtures with chlorine may explode on exposure to light. Nitrogen fluoride, trifluoroamine, trifluoroammonia chemical family inorganic halide 1. Material safety data sheet hydrofluoric acid, anhydrous msds number. Inhalation at even low concentrations irritates the respiratory tract. Nitrogen, compressed safety data sheet p4631 this sds conforms to u. Methane is not listed in the iarc, ntp or by osha as a carcinogen or potential carcinogen. Fluorine nitrogen mixtures fluorine mixtures can be used mainly to clean nonplasma deposition chambers and diffusion furnace for siliconbased films. Airopak f2n2 fluorine nitrogen mixtures create barrier properties or alter surface activation of the treated plastic surfaces. Avoid contact with strong oxidizers such as chlorine, fluorine, nitrogen tetraoxide, concentrated oxygen, and sodium hypochlorite or.
Aluminum fluoride material safety data sheet aluminum. In particular but not exclusively, the chemistry of binary nf species is discussed. Cas 7782414 7727379 20% fluorine in nitrogen gas mixture fluorine contained in ient 2 nitrogen gas msds toxicity property. Improper storage, handling, or use of fluorine mixtures can result in serious injury andor property damage. Decomposition products may include the following materials. If user operations generate dust, fumes or mist, use ventilation to. Nitrogen trifluoride nf3 safety data sheet sds p4854 praxair, inc. Safety data sheet fluorine nitrogen 2080 revision date 02232018 p00000019114 version. The prediction of possible human effects is based in part on observations made on laboratory animals. Gaseous nitrogen, vaporized from onsite liquid storage into a local distribution system, is used for a wide variety of applications, including blanketing, inerting, purging, stripping, and sparging. Handling and storage advice on general occupational hygiene conditions for safe storage, including any incompatibilities eating, drinking and. Details of the supplier of the safety data sheet emergency telephone number 2. Fluorine as this product is a gas, refer to the inhalation section. Avoid sources of ignition such as flames, hot surfaces, sparks, and electrical equipment.
Go to the nearest eye wash or clean source of water, open the water valve. The mixture, also called an airopak mix, contains 20% fluorine with the balance nitrogen. Ensure adequate ventilation, especially in confined areas. This mixture of two permanent gases will not separate or. Fluorine is a chemical element with the symbol f and atomic number 9. It is the lightest halogen and exists as a highly toxic pale yellow diatomic gas at standard conditions. Section 10 stability and reactivity conditions contributing to instability. Other supply modes ranging from cylinders to onsite generation are also used to deliver nitrogen gas. Accidental release measures use personal protection recommended in section 8, isolate the hazard area and deny entry to unnecessary and unprotected personnel. Substance any concentration shown as a range is to protect confidentiality or is due to batch variation. Wear splash resistant safety goggles with a faceshield.
The global electronics industry uses nitrogen trifluoride in its cleaning processes, because the gas outperforms other alternatives, is easier and safer to handle, and helps reduce greenhouse gas. Within the production process of semiconductors, one process step is the etching process. Osha, cma, ansi, canadian whmis standards and ec standards. Your new online msds binder is a place for you to store the material safety data sheets you need to deploy. Relevant structural parameters for the fluorine and nitrogen doped ncm obtained from pdf analysis of total scattering data. Nitrogen fluoride, trifluoroamine, trifluoroammonia. Occupational exposure limits, if available, are listed in section 8. Sulfuryl fluoride is a gas, which has no warning properties such as odor or eye irritation.
Recycled halon 1 with nitrogen page 1 of 5 issue date. Other companies are charging thousands of dollars to set up accounts and. Use this product in accordance with the material safety data sheet msds for 20% fluorine, balance nitrogen. Nitrogen trifluoride nitrogen trifluoride is a gas that is made of nitrogen and fluorine atoms. Fluorine in argon, helium, krypton, neon andor xenon page 1 of 9 revision date. Have a trained person remove contact lenses if present contact lenses should be prohibited, put your eyes in the water flow and hold eyelids open while flushing. Fluorine reacts slowly with water to form hydrofluoric acid. The experimental and theoretical chemistry of nitrogenfluorine compounds is an area that has seen considerable renaissance over the past decade. As the most electronegative element, it is extremely reactive, as it reacts with all other elements, except for argon, neon, and helium among the elements, fluorine ranks 24th in universal abundance and th in.
For more information, please refer to safety data sheets. Emergency telephone number with hours of operation. Health effects fluorine is highly toxic and must be handled with caution. The active fluorine is released only if sufficient energy is applied. Safety data sheet urea 4600 prilled ghs product identifier urea 46 other means of identification product type. Nitrogen afrox south africa a member of the linde group. Immediately flush eyes with plenty of water, occasionally lifting the upper and lower eyelids.
Aluminum fluoride aluminum fluoride material safety data sheet page 38 ingestion. Chronic effects intake of more than 6 mg of fluorine per day may result in fluorosis, bone and joint damage. Ammonia has potentially explosive or violent reactions with interhalogens, strong oxidizers, nitric acid, fluorine, and nitrogen oxide. Fluorine there are no additional ingredients present which, within the current knowledge of the supplier and in the concentrations applicable, are classified as hazardous to health or the environment and hence require reporting in this section. It is this property that makes it valuable as a nonreactive source of fluorine for etching and cleaning applications.
Typical mixtures is composed 20% f 2 in n 2 balance, and filled at high pressure in cylinder or larger packages. Nitrogen msds material safety data sheet for nitrogen n2 reference. Specific hazards arising from the chemical special protective equipment selfcontained breathing apparatus and full protective clothing must be worn in case of. Possibility of hazardous reactions hazardous polymerization does not occur. Draeger tubes which are not classified as dangerous goods id. To the best of our knowledge, this material safety data sheet conforms to the requirements of us osha 29 cfr 1910. Aluminum fluoride aluminum fluoride material safety data sheet page 18 chemical. Supporting information investigation of fluorine and. Our msds database is an easy to use, do it yourself tool, and best of all.
Msds 20% fluorine in nitrogen gas mixture fluorine. Other companies are charging thousands of dollars to set up accounts and give you access to their msds online database. Nitrogen trifluoride nf3 safety data sheet sds p4854. Product and company identificationproduct and company identification. Product composition ranges shown are typical values for health, safety and environmental use and. Typical mixtures is composed 20% f2 in n2 balance, and filled at high pressure in cylinder or larger packages. Methane is inactive biologically and essentially nontoxic. Irrigate eyes for at least 15 minutes with copious quantities of water, keeping eyelids apart and away from eyeballs during irrigation.
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